ISO/TC 107/SC 9
| Project No. | ISO/CD 25164 |
|---|---|
| Title | This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering. |
| Registration number (WIID) | 89207 |
| Scope | This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering. |
| Status | Izstrādē |
| ICS group | Not set |