This document defines terms and specifies procedures for the characterization of mass spectrometer leak detectors (MSLD). This document is not intended to provide a complete set of specifications for acceptance testing, but rather a description of procedures that can be applied without specialized calibration equipment.
The methods described in this document are applicable without restrictions to helium as the tracer gas. For other gases, additional precautions might be necessary.
These methods are applicable to commonly available MSLD, based on the present level of technology, which might be able to measure leakage rates down to 10−12 Pa⋅m3/s.
Registration number (WIID)
79206
Scope
This document defines terms and specifies procedures for the characterization of mass spectrometer leak detectors (MSLD). This document is not intended to provide a complete set of specifications for acceptance testing, but rather a description of procedures that can be applied without specialized calibration equipment.
The methods described in this document are applicable without restrictions to helium as the tracer gas. For other gases, additional precautions might be necessary.
These methods are applicable to commonly available MSLD, based on the present level of technology, which might be able to measure leakage rates down to 10−12 Pa⋅m3/s.
