Project No.EN ISO 14644-6:2007
TitleISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.
Registration number (WIID)11440
ScopeISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.
StatusAtcelts
ICS group13.040.35