CEN/TC 290
| Project No. | EN ISO 25178-607:2019 |
|---|---|
| Title | This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well. |
| Registration number (WIID) | 60591 |
| Scope | This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well. |
| Status | Standarts spēkā |
| ICS group | 17.040.20 |