CEN/TC 290
| Project No. | EN ISO 25178-603:2013 |
|---|---|
| Title | ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes. |
| Registration number (WIID) | 30383 |
| Scope | ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes. |
| Status | Atcelts |
| ICS group | 17.040.20 |