CEN/TC 290
| Project No. | prEN ISO 25178-607 rev |
|---|---|
| Title | This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well. |
| Registration number (WIID) | 80656 |
| Scope | This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well. |
| Status | Izstrādē |
| ICS group | Not set |