CEN/TC 290
| Project No. | LVS EN ISO 25178-604:2025 |
|---|---|
| Title | This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements. |
| Registration number (WIID) | 76821 |
| Scope | This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements. |
| Status | Standarts spēkā |
| ICS group | 17.040.20 |