<p>This document specifies a destructive method for the measurement of the local thickness of metallic and other inorganic coatings by examination of cross-sections with a scanning electron microscope (SEM). The method is applicable for thicknesses up to several millimetres, but for such thick coatings it is usually more practical to use a light microscope (see ISO 1463). The lower thickness limit depends on the achieved measurement uncertainty (see Clause 10).</p>
<p>NOTE The method can also be used for organic layers when they are neither damaged by the preparation of the cross-section nor by the electron beam during imaging.</p>
Registration number (WIID)
78212
Scope
<p>This document specifies a destructive method for the measurement of the local thickness of metallic and other inorganic coatings by examination of cross-sections with a scanning electron microscope (SEM). The method is applicable for thicknesses up to several millimetres, but for such thick coatings it is usually more practical to use a light microscope (see ISO 1463). The lower thickness limit depends on the achieved measurement uncertainty (see Clause 10).</p>
<p>NOTE The method can also be used for organic layers when they are neither damaged by the preparation of the cross-section nor by the electron beam during imaging.</p>
