ISO/TC 107
| Project No. | ISO/FDIS 23131-3 |
|---|---|
| Title | This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies. |
| Registration number (WIID) | 83903 |
| Scope | This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies. |
| Status | Izstrādē |
| ICS group | 17.020 |