ISO/TC 107
| Project No. | ISO/DIS 19383 |
|---|---|
| Title | This document describes the chemical characteristics and related process specifications of the atomic layer deposition precursors, including assay content, metal purity, and anion content specification. |
| Registration number (WIID) | 89126 |
| Scope | This document describes the chemical characteristics and related process specifications of the atomic layer deposition precursors, including assay content, metal purity, and anion content specification. |
| Status | Aptauja |
| ICS group | 25.220.01 |