This document specifies the requirements and test methods of coatings by powder atomic layer deposition (PALD). It provides the principle of coating thickness test method, the requirements of coating samples and measuring apparatus, as well as characterizations for coatings.
This document is applicable to a wide range of powder materials, including metallic, ceramic, and composite materials, where PALD is used to precisely deposit thin layer of metal or metal oxides on the surface.
This document does not apply to metal or metal oxide coatings under nucleation stage that has not formed continuous coatings.
Registration number (WIID)
91845
Scope
This document specifies the requirements and test methods of coatings by powder atomic layer deposition (PALD). It provides the principle of coating thickness test method, the requirements of coating samples and measuring apparatus, as well as characterizations for coatings.
This document is applicable to a wide range of powder materials, including metallic, ceramic, and composite materials, where PALD is used to precisely deposit thin layer of metal or metal oxides on the surface.
This document does not apply to metal or metal oxide coatings under nucleation stage that has not formed continuous coatings.
