<p>This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.</p>
<p>For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.</p>
<p>The monitoring given in this document is for use mainly in "operational" states.</p>
<p>NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.</p>
<p>NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.</p>
<p>NOTE 3 Health and safety considerations are excluded from this document.</p>
Registration number (WIID)
69432
Scope
<p>This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.</p>
<p>For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.</p>
<p>The monitoring given in this document is for use mainly in "operational" states.</p>
<p>NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.</p>
<p>NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.</p>
<p>NOTE 3 Health and safety considerations are excluded from this document.</p>
