<p class="MsoBodyText"><span lang="EN-GB">This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).</span></p>
<p class="MsoBodyText"><span lang="EN-GB">This document does not apply to the following:</span></p>
<ul>
<li class="ListContinue1"><!-- [if !supportLists]--><span lang="EN-GB">health and safety requirements;</span></li>
<li class="ListContinue1"><!--[endif]--><span lang="EN-GB">compatibility with cleaning agents and techniques;</span></li>
<li class="ListContinue1"><!--[endif]--><span lang="EN-GB">cleanability;</span></li>
<li class="ListContinue1"><!-- [if !supportLists]--><span lang="EN-GB">biocontamination;</span></li>
<li class="ListContinue1"><!--[endif]--><span lang="EN-GB">specific requirements of equipment and materials for processes and products;</span></li>
<li class="ListContinue1"><!-- [if !supportLists]--><span lang="EN-GB">design details of equipment.</span></li>
</ul>
Registration number (WIID)
91616
Scope
<p class="MsoBodyText"><span lang="EN-GB">This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).</span></p>
<p class="MsoBodyText"><span lang="EN-GB">This document does not apply to the following:</span></p>
<ul>
<li class="ListContinue1"><!-- [if !supportLists]--><span lang="EN-GB">health and safety requirements;</span></li>
<li class="ListContinue1"><!--[endif]--><span lang="EN-GB">compatibility with cleaning agents and techniques;</span></li>
<li class="ListContinue1"><!--[endif]--><span lang="EN-GB">cleanability;</span></li>
<li class="ListContinue1"><!-- [if !supportLists]--><span lang="EN-GB">biocontamination;</span></li>
<li class="ListContinue1"><!--[endif]--><span lang="EN-GB">specific requirements of equipment and materials for processes and products;</span></li>
<li class="ListContinue1"><!-- [if !supportLists]--><span lang="EN-GB">design details of equipment.</span></li>
</ul>
