ISO/TC 213

Project No.ISO 25178-604:2013
Title<p>ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.</p>
Registration number (WIID)51381
Scope<p>ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.</p>
StatusAtcelts
ICS group17.040.20