ISO/TC 213

Project No.ISO 25178-603:2013
Title<p>ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.</p>
Registration number (WIID)61236
Scope<p>ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.</p>
StatusAtcelts
ICS group17.040.20