<p class="MsoBodyText"><span lang="EN-GB">This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.</span></p>
Registration number (WIID)
79676
Scope
<p class="MsoBodyText"><span lang="EN-GB">This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.</span></p>
