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LVS EN 62047-11:2014
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (IEC 62047-11:2013)
16.40 €
LVS EN 62047-1:2016
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
20.34 €
LVS EN 62047-12:2012
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011)
19.44 €
LVS EN 62047-13:2012
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures (IEC 62047-13:2012)
13.97 €
LVS EN 62047-14:2012
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials (IEC 62047-14:2012)
14.87 €
LVS EN 62047-16:2015
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods
13.05 €
LVS EN 62047-17:2015
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
19.44 €
LVS EN 62047-18:2014
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials (IEC 62047-18:2013)
13.05 €
LVS EN 62047-19:2014
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses (IEC 62047-19:2013)
19.44 €
LVS EN 62047-20:2015
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
24.60 €
LVS EN 62047-21:2015
standard
EN
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
13.97 €
LVS EN 62047-2:2007
standard
EN
Semiconductor devices - Micro electromechanical devices - Part 2: Tensile testing method of thin film materials
13.05 €