ISO/TC 107/SC 9

Projekta Nr.ISO/DIS 25164
NosaukumsThis document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.
Reģistrācijas numurs (WIID)89207
Darbības sfēraThis document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.
StatussAptauja
ICS grupa25.220.40