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This document specifies a method for measuring the thickness of non-metallic coatings using time
domain spectroscopy in the terahertz frequency range.
This method can be used for all coatings that are transparent to electromagnetic waves in the terahertz
range, typically from around 10 µm depending on the material. The coatings can be deposited on both
metallic and non-metallic base materials. The thickness of all individual layers of a layer stack can also
be determined in a single measurement.
This method is also suitable if the layers to be tested are not applied to a substrate but are freestanding. Metallic or generally conductive layers cannot be penetrated by terahertz radiation, but act as a reflector, i.e. their thicknesses cannot be determined using this method.
Reģistrācijas numurs (WIID)
84219
Darbības sfēra
This document specifies a method for measuring the thickness of non-metallic coatings using time
domain spectroscopy in the terahertz frequency range.
This method can be used for all coatings that are transparent to electromagnetic waves in the terahertz
range, typically from around 10 µm depending on the material. The coatings can be deposited on both
metallic and non-metallic base materials. The thickness of all individual layers of a layer stack can also
be determined in a single measurement.
This method is also suitable if the layers to be tested are not applied to a substrate but are freestanding. Metallic or generally conductive layers cannot be penetrated by terahertz radiation, but act as a reflector, i.e. their thicknesses cannot be determined using this method.
