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This document specifies the design, metrological characteristics and nominal characteristics of contact stylus instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
Reģistrācijas numurs (WIID)
76818
Darbības sfēra
This document specifies the design, metrological characteristics and nominal characteristics of contact stylus instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
