Projekta Nr.ISO/DIS 19383
NosaukumsThis document describes the chemical characteristics and related process specifications of the atomic layer deposition precursors, including assay content, metal purity, and anion content specification.
Reģistrācijas numurs (WIID)89126
Darbības sfēraThis document describes the chemical characteristics and related process specifications of the atomic layer deposition precursors, including assay content, metal purity, and anion content specification.
StatussAptauja
ICS grupa25.220.01