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<p class="MsoBodyText" style="mso-layout-grid-align: none; text-autospace: none;"><span lang="EN-GB" style="mso-bidi-font-size: 12.0pt; mso-ascii-font-family: Cambria; mso-ascii-theme-font: major-latin; mso-fareast-font-family: 'MS Mincho'; mso-hansi-font-family: Cambria; mso-hansi-theme-font: major-latin;">This document specifies methods for the measurement of pumping characteristics of non-evaporable getters (NEGs). It is applicable to all sizes and all types of NEGs, including those:</span></p>
<p class="ListContinue1" style="tab-stops: 19.85pt 39.7pt 59.55pt 79.4pt 99.25pt 119.05pt 138.9pt 158.75pt 178.6pt 7.0cm; mso-layout-grid-align: none; text-autospace: none;"><span lang="EN-GB" style="mso-bidi-font-size: 12.0pt; mso-ascii-font-family: Cambria; mso-ascii-theme-font: major-latin; mso-fareast-font-family: 'MS Mincho'; mso-hansi-font-family: Cambria; mso-hansi-theme-font: major-latin;">—<span style="mso-tab-count: 1;"> </span>with the shape of pill, disk, ring, strip, module, cartridge;</span></p>
<p class="ListContinue1" style="tab-stops: 19.85pt 39.7pt 59.55pt 79.4pt 99.25pt 119.05pt 138.9pt 158.75pt 178.6pt 7.0cm; mso-layout-grid-align: none; text-autospace: none;"><span lang="EN-GB" style="mso-bidi-font-size: 12.0pt; mso-ascii-font-family: Cambria; mso-ascii-theme-font: major-latin; mso-fareast-font-family: 'MS Mincho'; mso-hansi-font-family: Cambria; mso-hansi-theme-font: major-latin;">—<span style="mso-tab-count: 1;"> </span>with pump structures;</span></p>
<p class="ListContinue1" style="tab-stops: 19.85pt 39.7pt 59.55pt 79.4pt 99.25pt 119.05pt 138.9pt 158.75pt 178.6pt 7.0cm; mso-layout-grid-align: none; text-autospace: none;"><span lang="EN-GB" style="mso-bidi-font-size: 12.0pt; mso-ascii-font-family: Cambria; mso-ascii-theme-font: major-latin; mso-fareast-font-family: 'MS Mincho'; mso-hansi-font-family: Cambria; mso-hansi-theme-font: major-latin;">—<span style="mso-tab-count: 1;"> </span>and NEG coatings on inner surface of pipes and vacuum chamber.</span></p>
<p class="MsoBodyText" style="mso-layout-grid-align: none; text-autospace: none;"><span lang="EN-GB" style="mso-bidi-font-size: 12.0pt; mso-ascii-font-family: Cambria; mso-ascii-theme-font: major-latin; mso-fareast-font-family: 'MS Mincho'; mso-hansi-font-family: Cambria; mso-hansi-theme-font: major-latin;">A significant difference of pumping characteristics of the NEG and other vacuum pumps is that the pumping speed of the NEG depends on the sorption quantity. Furthermore, especially in the case of NEG coating, the sticking probability rather than the pumping speed is often the index of the pumping performance. Therefore, this document specifies the methods for measuring the pumping speed, the sorption quantity, and the sticking probability of NEGs.</span></p>
<p class="Notice"><span lang="EN-GB">WARNING<span style="mso-tab-count: 1;"> </span>It is assumed that the user is familiar with the handling of combustible gases and poisonous ones and with ultra-high vacuum technology.</span></p>
Reģistrācijas numurs (WIID)
80496
Darbības sfēra
<p class="MsoBodyText" style="mso-layout-grid-align: none; text-autospace: none;"><span lang="EN-GB" style="mso-bidi-font-size: 12.0pt; mso-ascii-font-family: Cambria; mso-ascii-theme-font: major-latin; mso-fareast-font-family: 'MS Mincho'; mso-hansi-font-family: Cambria; mso-hansi-theme-font: major-latin;">This document specifies methods for the measurement of pumping characteristics of non-evaporable getters (NEGs). It is applicable to all sizes and all types of NEGs, including those:</span></p>
<p class="ListContinue1" style="tab-stops: 19.85pt 39.7pt 59.55pt 79.4pt 99.25pt 119.05pt 138.9pt 158.75pt 178.6pt 7.0cm; mso-layout-grid-align: none; text-autospace: none;"><span lang="EN-GB" style="mso-bidi-font-size: 12.0pt; mso-ascii-font-family: Cambria; mso-ascii-theme-font: major-latin; mso-fareast-font-family: 'MS Mincho'; mso-hansi-font-family: Cambria; mso-hansi-theme-font: major-latin;">—<span style="mso-tab-count: 1;"> </span>with the shape of pill, disk, ring, strip, module, cartridge;</span></p>
<p class="ListContinue1" style="tab-stops: 19.85pt 39.7pt 59.55pt 79.4pt 99.25pt 119.05pt 138.9pt 158.75pt 178.6pt 7.0cm; mso-layout-grid-align: none; text-autospace: none;"><span lang="EN-GB" style="mso-bidi-font-size: 12.0pt; mso-ascii-font-family: Cambria; mso-ascii-theme-font: major-latin; mso-fareast-font-family: 'MS Mincho'; mso-hansi-font-family: Cambria; mso-hansi-theme-font: major-latin;">—<span style="mso-tab-count: 1;"> </span>with pump structures;</span></p>
<p class="ListContinue1" style="tab-stops: 19.85pt 39.7pt 59.55pt 79.4pt 99.25pt 119.05pt 138.9pt 158.75pt 178.6pt 7.0cm; mso-layout-grid-align: none; text-autospace: none;"><span lang="EN-GB" style="mso-bidi-font-size: 12.0pt; mso-ascii-font-family: Cambria; mso-ascii-theme-font: major-latin; mso-fareast-font-family: 'MS Mincho'; mso-hansi-font-family: Cambria; mso-hansi-theme-font: major-latin;">—<span style="mso-tab-count: 1;"> </span>and NEG coatings on inner surface of pipes and vacuum chamber.</span></p>
<p class="MsoBodyText" style="mso-layout-grid-align: none; text-autospace: none;"><span lang="EN-GB" style="mso-bidi-font-size: 12.0pt; mso-ascii-font-family: Cambria; mso-ascii-theme-font: major-latin; mso-fareast-font-family: 'MS Mincho'; mso-hansi-font-family: Cambria; mso-hansi-theme-font: major-latin;">A significant difference of pumping characteristics of the NEG and other vacuum pumps is that the pumping speed of the NEG depends on the sorption quantity. Furthermore, especially in the case of NEG coating, the sticking probability rather than the pumping speed is often the index of the pumping performance. Therefore, this document specifies the methods for measuring the pumping speed, the sorption quantity, and the sticking probability of NEGs.</span></p>
<p class="Notice"><span lang="EN-GB">WARNING<span style="mso-tab-count: 1;"> </span>It is assumed that the user is familiar with the handling of combustible gases and poisonous ones and with ultra-high vacuum technology.</span></p>
