Projekta Nr.ISO 22278:2020
Nosaukums<p>This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.</p>
Reģistrācijas numurs (WIID)73015
Darbības sfēra<p>This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.</p>
StatussStandarts spēkā
ICS grupa81.060.30