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<p class="MsoBodyText"><span lang="EN-GB">This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, <em style="mso-bidi-font-style: normal;">R</em><sub>a</sub>, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, <em style="mso-bidi-font-style: normal;">R</em><sub>sm</sub>, in the range of about 0,04 μm to 2,5 μm.</span></p>
Reģistrācijas numurs (WIID)
85556
Darbības sfēra
<p class="MsoBodyText"><span lang="EN-GB">This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, <em style="mso-bidi-font-style: normal;">R</em><sub>a</sub>, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, <em style="mso-bidi-font-style: normal;">R</em><sub>sm</sub>, in the range of about 0,04 μm to 2,5 μm.</span></p>
