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This international standard specifies a test method for determining physical film thickness by confocal laser scanning microscope. The method is one of non-destructive film thickness measurement methods and applicable for thin films or coatings with optical absorption in wavelength range of the laser emission. Contrary, it is difficult to apply this method for thin films or coatings that are transparent in wavelength range of the laser emission.
Reģistrācijas numurs (WIID)
91644
Darbības sfēra
This international standard specifies a test method for determining physical film thickness by confocal laser scanning microscope. The method is one of non-destructive film thickness measurement methods and applicable for thin films or coatings with optical absorption in wavelength range of the laser emission. Contrary, it is difficult to apply this method for thin films or coatings that are transparent in wavelength range of the laser emission.
