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<p><span lang="EN-GB">This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) levels and which techniques should be considered to achieve these specified levels.</span></p>
<p><span lang="EN-GB">The appropriateness of cleaning techniques will make reference to the cleanliness levels and associated test methods found in ISO 14644-9 and ISO 14644-10.</span></p>
<p><span lang="EN-GB">The document gives general guidance on the following:</span></p>
<ul>
<li><span lang="EN-GB">expected surface cleanliness levels;</span></li>
<li><span lang="EN-GB">suitability of cleaning methods;</span></li>
<li><span lang="EN-GB">compatibility of surfaces with the cleaning technique;</span></li>
<li><span lang="EN-GB">assessment of cleaning appropriateness.</span></li>
</ul>
<p><span lang="EN-GB">The following are excluded from this document:</span></p>
<ul>
<li><span lang="EN-GB">classification of cleaning methods;</span></li>
<li><span lang="EN-GB">product produced within a cleanroom;</span></li>
<li><span lang="EN-GB">specific surface-related cleaning methods;</span></li>
<li><span lang="EN-GB">detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;</span></li>
<li><span lang="EN-GB">detailed material characteristics;</span></li>
<li><span lang="EN-GB">description of damage mechanisms by cleaning processes and time-dependent effects;</span></li>
<li><span lang="EN-GB">references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;</span></li>
<li><span lang="EN-GB">other characteristics of particles such as electrostatic charge, ionic charges, etc.;</span></li>
<li><span lang="EN-GB">chemical reactions between molecular contaminants and surfaces;</span></li>
<li><!-- [if !supportLists]--><span lang="EN-GB">microbiological aspects of surface cleanliness;</span></li>
<li><span lang="EN-GB">radioactive aspects of contamination;</span></li>
<li><span lang="EN-GB">health and safety considerations;</span></li>
<li><span lang="EN-GB">environmental aspects such as waste disposal, emissions, etc.;</span></li>
<li><span lang="EN-GB">selection and use of statistical methods.</span></li>
</ul>
Reģistrācijas numurs (WIID)
91614
Darbības sfēra
<p><span lang="EN-GB">This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) levels and which techniques should be considered to achieve these specified levels.</span></p>
<p><span lang="EN-GB">The appropriateness of cleaning techniques will make reference to the cleanliness levels and associated test methods found in ISO 14644-9 and ISO 14644-10.</span></p>
<p><span lang="EN-GB">The document gives general guidance on the following:</span></p>
<ul>
<li><span lang="EN-GB">expected surface cleanliness levels;</span></li>
<li><span lang="EN-GB">suitability of cleaning methods;</span></li>
<li><span lang="EN-GB">compatibility of surfaces with the cleaning technique;</span></li>
<li><span lang="EN-GB">assessment of cleaning appropriateness.</span></li>
</ul>
<p><span lang="EN-GB">The following are excluded from this document:</span></p>
<ul>
<li><span lang="EN-GB">classification of cleaning methods;</span></li>
<li><span lang="EN-GB">product produced within a cleanroom;</span></li>
<li><span lang="EN-GB">specific surface-related cleaning methods;</span></li>
<li><span lang="EN-GB">detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;</span></li>
<li><span lang="EN-GB">detailed material characteristics;</span></li>
<li><span lang="EN-GB">description of damage mechanisms by cleaning processes and time-dependent effects;</span></li>
<li><span lang="EN-GB">references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;</span></li>
<li><span lang="EN-GB">other characteristics of particles such as electrostatic charge, ionic charges, etc.;</span></li>
<li><span lang="EN-GB">chemical reactions between molecular contaminants and surfaces;</span></li>
<li><!-- [if !supportLists]--><span lang="EN-GB">microbiological aspects of surface cleanliness;</span></li>
<li><span lang="EN-GB">radioactive aspects of contamination;</span></li>
<li><span lang="EN-GB">health and safety considerations;</span></li>
<li><span lang="EN-GB">environmental aspects such as waste disposal, emissions, etc.;</span></li>
<li><span lang="EN-GB">selection and use of statistical methods.</span></li>
</ul>
