Projekta Nr.IEC/TR 63258:2021
NosaukumsIEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
Reģistrācijas numurs (WIID)75422
Darbības sfēraIEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
StatussStandarts spēkā
ICS grupa07.120